Which power supply is best for insulating layers?
Since the introduction of dual-magnetron sputtering (DMS) for highly insulating layers, there is the choice between square wave pulse or sine wave power supplies.
How does a square wave generator work?
In DMS, the current path is perpendicular to the anode (right magnetron), through which the plasma is pushed towards the substrate. Sometimes it is argued that a square wave generator is the best choice for reactive sputtering, as it will deliver voltage, current and power at approximately 100% duty cycle during each half-wave.
What is the difference between a square wave generator and a sine wave generator?
Today, both types of generators are available in a wide power range and modern sine wave generators are equivalent to their square wave counterparts with respect to the arc management speed and low arc energies [3,4].
Are bipolar square wave generators more flexible than sine waves?
Even at an early time it has been argued that a bipolar square wave generator is more flexible with respect to symmetry and duty cycle, but that sine wave generators are easier to implement for high output powers.
What is the difference between a square wave generator and a refractive index?
The square wave generator shows a slightly higher deposition rate. The refractive index or optical density shows the opposite trend. As Figure 7 shows, here the values for the sine wave generator are slightly higher. In optical coatings, the target is often the so-called optical thickness, the product of refractive index with thickness n*thk.
Which power supply is best for a low power rating?
For illustration, the CAPEX for a power supply is shown as a function of the rated output power in Figure 9. For low power ratings up to 50kW, bipolar square generators are usually the better alternative. Here the flexibility regarding simple frequency changing and signal shape is useful.
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Design and verification of a cascaded nanosecond rise time
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Jan 28, PDF | Review of classical switch mode power supplies. | Find, read and cite all the research you need on ResearchGate
Design and verification of a cascaded nanosecond rise time
Jan 3, The energy storage capacitors are critical components in the proposed cascaded nanosecond rise time high-voltage positive polarity square wave power supply. They store
(PDF) Basics of square-wave switch mode power supplies
Jan 28, PDF | Review of classical switch mode power supplies. | Find, read and cite all the research you need on ResearchGate
Solar Container Energy Discussion
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